Search Results
Showing 1 - 10 of 14 results
Search Results
Metrology for submicrometer devices and circuits
| Location | Call # | Status |
|---|---|---|
| Joyner - Fed Docs Stacks | C 13.10:400-61 | ✔ Available |
Accurate linewidth measurement on integrated-circuit photomasks
| Location | Call # | Status |
|---|---|---|
| Joyner - Fed Docs Stacks | C 13.10:400-43 | ✔ Available |
Characterization of a high frequency probe assembly for integrated circuit measurement
| Location | Call # | Status |
|---|---|---|
| Joyner - Fed Docs Stacks | C 13.46:663 | ✔ Available |
Measurement assurance for dimensional measurements on integrated-circuit photomasks
| Location | Call # | Status |
|---|---|---|
| Joyner - Microforms B300 | C 13.46:1164 | ✔ Available |
Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
| Location | Call # | Status |
|---|---|---|
| Joyner - Microforms B300 | C 13.10:260-129 | ✔ Available |
Optical and dimensional-measurement problems with photomasking in microelectronics
| Location | Call # | Status |
|---|---|---|
| Joyner - Fed Docs Stacks | C13.10:400-20 | ✔ Available |
/LC.GIF&client=easterncarolinaedu)
ARPA/NBS workshop I: measurement problems in integrated circuit processing and assembly
| Location | Call # | Status |
|---|---|---|
| Joyner - Fed Docs Stacks | C 13.10:400-3 | ✔ Available |
