Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems / James E. Potzick.

Author/creator Potzick, James E.
Other author National Institute of Standards and Technology (U.S.)
Format Microform
Publication InfoGaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington : For sale by the Supt. of Docs., U.S. G.P.O., 1997.
Descriptionxiii, 23 pages : illustrations ; 28 cm.
Subjects

Variant title Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
SeriesStandard reference materials
NIST special publication ; 260-129
NIST special publication 260-129. ^A390056
Standard reference materials. ^A420608
General noteDistributed to depository libraries in microfiche.
General noteShipping list no.: 98-0086-M.
Bibliography noteIncludes bibliographical references (p. 17-18).
Reproduction noteJoyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1997] 1 microfiche : negative.
GPO item number0247 (MF)
Govt. docs number C 13.10:260-129

Availability

Library Location Call Number Status Item Actions
Joyner Microforms B300 C 13.10:260-129 ✔ Available