Tools

LEADER 01644cam a2200433 i 4500

001 ocm06527685;

003 OCoLC;

005 20141212182333.0;

008 801113s1980 dcua b f000 0 eng ;

010 a| 80600054;

020 c| $2.25;

035 a| (Sirsi) o06527685;

035 a| (OCoLC)6527685;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-61a| TK7874;

082 0 a| 602/.18 sa| 621.381/73/02872| 19;

086 0 a| C 13.10:400-61;

100 1 a| Bullis, W. Murray,d| 1930-=| ^A434230;

245 10 a| Metrology for submicrometer devices and circuits /c| W. Murray Bullis.;

260 a| Washington, D.C. :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. Govt. Print. Off,c| 1980.;

300 a| vi, 34 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| NBS special publication ;v| 400-61;

490 1 a| Semiconductor measurement technology;

500 a| "Issued June 1980.";

504 a| Includes bibliographical references.;

650 0 a| Integrated circuitsx| Testing.=| ^A450737;

650 0 a| Integrated circuitsx| Measurement.=| ^A42814;

650 0 a| Semiconductorsx| Testing.=| ^A65728;

650 0 a| Semiconductorsx| Measurement.=| ^A16124;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-61.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 997991;

999 a| C 13.10:400-61w| SUDOCc| 1i| 30372013334120d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/8/2005x| BOOKz| JFEDDOCSo| .STAFF. 0;

Metrology for submicrometer devices and circuits / W. Murray Bullis.

Author/creator	Bullis, W. Murray, 1930-
Format	Book
Publication Info	Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1980.
Description	vi, 34 pages : illustrations ; 26 cm.
Subjects	Integrated circuits--Testing. Integrated circuits--Measurement. Semiconductors--Testing. Semiconductors--Measurement.

Series	NBS special publication ; 400-61 Semiconductor measurement technology Semiconductor measurement technology. ^A428054 NBS special publication 400-61. ^A2701
General note	"Issued June 1980."
Bibliography note	Includes bibliographical references.
LCCN	80600054
Govt. docs number	C 13.10:400-61

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C 13.10:400-61	✔ Available	Place Hold

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