Tools

LEADER 02286cam a2200457Ia 4500

001 ocm09210242;

003 OCoLC;

005 20230725092848.0;

007 he bmb024baca;

008 830210s1982 dcua bb f000 0 eng d;

019 a| 1176137913a| 1225806399;

035 a| (Sirsi) o09210242;

043 a| n-us---;

049 a| ERE$;

050 4 a| QC100b| .U5753 no. 1164;

074 a| 0249-A (MF);

086 0 a| C 13.46:1164;

100 1 a| Croarkin, Carroll,0| https://id.loc.gov/authorities/names/n79029627,e| author.=| ^A602262;

245 10 a| Measurement assurance for dimensional measurements on integrated-circuit photomasks /c| Carroll Croarkin, Ruth N. Varner.;

264 1 a| Washington, D.C. :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. G.P.O.,c| 1982.;

300 a| 44 pages in various pagings :b| illustrations ;c| 28 cm.;

336 a| textb| txt2| rdacontent;

337 a| microformb| h2| rdamedia;

338 a| microficheb| he2| rdacarrier;

490 1 a| NBS technical note ;v| 1164;

500 a| "Statistical Engineering Division, Center for Applied Mathematics, National Bureau of Standards.";

500 a| "Issued August 1982.";

504 a| Includes bibliographical references.;

500 a| GPO Historic Shelflist Project- publication not in hand.;

500 a| GPO Cataloging Record Distribution Program (CRDP).;

650 0 a| Optical instrumentsx| Calibration.=| ^A1451580;

650 0 a| Integrated circuitsx| Masksx| Measurement.=| ^A311286;

700 1 a| Varner, Ruth N.0| https://id.loc.gov/authorities/names/n82157813,e| author.=| ^A447956;

830 0 a| NBS technical note ;0| https://id.loc.gov/authorities/names/n42033257 ;v| 1164.=| ^A4336;

949 a| C 13.46:1164w| sudoch| joyner32;

596 a| 1;

998 a| 5931120;

999 a| C 13.46:1164w| SUDOCc| 1i| 5931120-1001l| JDOMIm| JOYNERr| Ys| Yt| JDOFMIu| 11/15/2022x| MICROFORMz| JFEDDOCS;

Measurement assurance for dimensional measurements on integrated-circuit photomasks / Carroll Croarkin, Ruth N. Varner.

Author/creator	Croarkin, Carroll author.
Other author	Varner, Ruth N. author.
Other author	National Engineering Laboratory (U.S.). Statistical Engineering Division issuing body.
Format	Microform
Publication	Washington, D.C. : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O., 1982.
Description	44 pages in various pagings : illustrations ; 28 cm.
Subjects	Optical instruments--Calibration. Integrated circuits--Masks. --Measurement.

Series	NBS technical note ; 1164 NBS technical note ; https://id.loc.gov/authorities/names/n42033257 ; 1164. ^A4336
General note	"Statistical Engineering Division, Center for Applied Mathematics, National Bureau of Standards."
General note	"Issued August 1982."
General note	GPO Historic Shelflist Project- publication not in hand.
General note	GPO Cataloging Record Distribution Program (CRDP).
Bibliography note	Includes bibliographical references.
Reproduction note	Microfiche. [Washington, D.C.] : Supt. of Docs., G.P.O., 1982. 1 microfiche.
GPO item number	0249-A (MF)
Govt. docs number	C 13.46:1164

Library	Location	Call Number	Status	Item Actions
Joyner	Microforms B300	C 13.46:1164	✔ Available

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