Optical and dimensional-measurement problems with photomasking in microelectronics / John M. Jerke.
| Author/creator | Jerke, John M. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1975. |
| Description | iv, 36 pages : illustrations ; 26 cm. |
| Subjects |
| Series | Semiconductor measurement technology NBS special publication ; 400-20 Semiconductor measurement technology. ^A428054 NBS special publication 400-20. ^A2701 |
| Bibliography note | Includes bibliographical references (p. 31-36). |
| LCCN | 75619190 |
| Govt. docs number | C13.10:400-20 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C13.10:400-20 | ✔ Available | Place Hold |