Tools

LEADER 01900cam a2200445 i 4500

001 ocm05561858;

003 OCoLC;

005 20141212182333.0;

008 790919s1979 dcua b f000 0 eng ;

010 a| 78600155;

020 c| $1.20;

035 a| (Sirsi) o05561858;

035 a| (OCoLC)5561858;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-55a| TK7871.85;

082 0 a| 602/.1 sa| 621.3815/2/028;

086 0 a| C 13.10:400-55;

100 1 a| Koyama, R. Y.=| ^A598146;

245 12 a| A wafer chuck for use between -196 and 350⁰C /c| R.Y. Koyama and M.G. Buehler.;

260 a| Washington :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. Govt. Print. Off,c| 1979.;

300 a| vi, 17 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| National Bureau of Standards special publication ;v| 400-55;

500 a| "Sponsored by Division of Electric Energy Systems, Department of Energy and the Defense Advanced Research Projects Agency.";

504 a| Includes bibliographical references (p. 13).;

650 0 a| Semiconductorsx| Testingx| Equipment and supplies.=| ^A65728;

650 0 a| Probes (Electronic instruments)=| ^A38846;

700 1 a| Buehler, Martin G.,e| author.=| ^A450736;

710 1 a| United States.b| Division of Electric Energy Systems.=| ^A598147;

710 1 a| United States.b| Defense Advanced Research Projects Agency.=| ^A87541;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-55.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 997985;

999 a| C 13.10:400-55w| SUDOCc| 1i| 30372013334054d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/8/2005x| BOOKz| JFEDDOCSo| .STAFF. 0;

A wafer chuck for use between -196 and 350⁰C / R.Y. Koyama and M.G. Buehler.

Author/creator	Koyama, R. Y.
Other author	Buehler, Martin G., author.
Other author	United States. Division of Electric Energy Systems.
Other author	United States. Defense Advanced Research Projects Agency.
Format	Book
Publication Info	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1979.
Description	vi, 17 pages : illustrations ; 26 cm.
Subjects	Semiconductors--Testing. --Equipment and supplies. Probes (Electronic instruments)

Series	Semiconductor measurement technology National Bureau of Standards special publication ; 400-55 Semiconductor measurement technology. ^A428054 NBS special publication 400-55. ^A2701
General note	"Sponsored by Division of Electric Energy Systems, Department of Energy and the Defense Advanced Research Projects Agency."
Bibliography note	Includes bibliographical references (p. 13).
LCCN	78600155
Govt. docs number	C 13.10:400-55

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C 13.10:400-55	✔ Available	Place Hold

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