Microelectronic processing laboratory at NBS / T.F. Leedy, Y.M. Liu.

Author/creator Leedy, T. F.
Other author Liu, Y. M. (Yan M.), author.
Format Book
Publication InfoWashington : .U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1978.
Descriptioniv, 28 pages : illustrations ; 27 cm.
Subjects

SeriesSemiconductor measurement technology
National Bureau of Standards special publication ; 400-53
Semiconductor measurement technology. ^A428054
NBS special publication 400-53. ^A2701
LCCN 78026038
Govt. docs number C 13.10:400-53

Availability

Library Location Call Number Status Item Actions
Joyner Fed Docs Stacks C 13.10:400-53 ✔ Available Place Hold