Microelectronic processing laboratory at NBS / T.F. Leedy, Y.M. Liu.
| Author/creator | Leedy, T. F. |
| Other author | Liu, Y. M. (Yan M.), author. |
| Format | Book |
| Publication Info | Washington : .U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1978. |
| Description | iv, 28 pages : illustrations ; 27 cm. |
| Subjects |
| Series | Semiconductor measurement technology National Bureau of Standards special publication ; 400-53 Semiconductor measurement technology. ^A428054 NBS special publication 400-53. ^A2701 |
| LCCN | 78026038 |
| Govt. docs number | C 13.10:400-53 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-53 | ✔ Available | Place Hold |