Tools

LEADER 01484cam a2200385 i 4500

001 ocm03706822;

003 OCoLC;

005 20141212182331.0;

008 780210s1978 dcua b f000 0 eng ;

010 a| 78002200;

035 a| (Sirsi) o03706822;

035 a| (OCoLC)3706822;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-30a| TK7878.6;

082 00 a| 602.1 sa| 621.3815/48;

086 0 a| C 13.10:400-30;

100 1 a| Christou, A.=| ^A598131;

245 10 a| Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics /c| A. Christou.;

260 a| Washington :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Docs., U.S. Govt. Print. Off,c| 1978.;

300 a| v, 32 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NBS special publication ;v| 400-30;

504 a| Includes bibliographical references.;

650 0 a| Probes (Electronic instruments)=| ^A38846;

650 0 a| Semiconductor wafersx| Testing.=| ^A444257;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-30.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 997962;

999 a| C 13.10:400-30w| SUDOCc| 1i| 30372013333866d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/8/2005x| BOOKz| JFEDDOCSo| .STAFF. 0;

Automated scanning low-energy electron probe (ASLEEP) for semiconductor wafer diagnostics / A. Christou.

Author/creator	Christou, A.
Format	Book
Publication Info	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. Govt. Print. Off, 1978.
Description	v, 32 pages : illustrations ; 26 cm.
Subjects	Probes (Electronic instruments) Semiconductor wafers--Testing.

Series	Semiconductor measurement technology NBS special publication ; 400-30 Semiconductor measurement technology. ^A428054 NBS special publication 400-30. ^A2701
Bibliography note	Includes bibliographical references.
LCCN	78002200
Govt. docs number	C 13.10:400-30

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C 13.10:400-30	✔ Available	Place Hold

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