Silicon device processing ; proceedings / Charles P. Marsden, editor.
| Author/creator | Symposium on Silicon Device Processing |
| Other author | Marsden, Charles P. editor. |
| Other author | American Society for Testing and Materials. Committee F-1 on Materials for Electron Devices and Microelectronics. |
| Format | Book |
| Publication Info | Washington : U.S. National Bureau of Standards; for sale by the Supt. of Docs., U.S. Govt. Print. Off, 1970. |
| Description | x, 457 pages : illustrations ; 27 cm. |
| Subjects |
| Series | National Bureau of Standards special publication 337 NBS special publication 337. ^A2701 |
| General note | "A United States Department of Commerce publication." |
| General note | "CODEN: XNBSA." |
| General note | "Held ... under the sponsorship of Committee F-1 of the American Society for Testing and Materials and the National Bureau of Standards." |
| Bibliography note | Includes bibliographical references. |
| LCCN | 74608543 |
| Govt. docs number | C 13.10:337 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:337 | ✔ Available | Place Hold |