The certification of 100 mm diameter silicon resistivity SRMs 2541 through 2547 using dual-configuration four-point probe measurements / J.R. Ehrstein, M.C. Croarkin.

Author/creator Ehrstein, James R.
Other author Croarkin, M. C. (Mary Carroll), 1934-
Other author National Institute of Standards and Technology (U.S.)
Format Microform
Publication InfoGaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1997.
Descriptionxv, 84 pages : illustrations ; 28 cm.
Subjects

Variant title Certification of one hundred mm diameter silicon resistivity SRMs ...
SeriesStandard reference materials
NIST special publication ; 260-131
NIST special publication 260-131. ^A390056
Standard reference materials. ^A420608
General noteShipping list no.: 98-0569-M.
General note"August 1997."
Bibliography noteIncludes bibliographical references.
Reproduction noteJoyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [1998] 2 microfiches : negative.
GPO item number0247 (MF)
Govt. docs number C 13.10:260-131

Availability

Library Location Call Number Status Item Actions
Joyner Microforms B300 C 13.10:260-131 ✔ Available