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LEADER 01742cam a2200433 a 4500

001 ocm44881135;

003 OCoLC;

005 20141208180321.0;

007 he bmb024bbca;

008 000825m20009999mdua bb f000 0 eng d;

035 a| (Sirsi) o44881135;

035 a| (OCoLC)44881135;

049 a| ERE$;

074 a| 0247-D (MF);

086 0 a| C 13.58:;

245 00 a| SEM Sentinel :b| SEM performance measurement system /c| Alice V. Ling [and others].;

246 3 a| Scanning electron microscope Sentinel;

246 30 a| SEM performance measurement system;

246 3 a| Scanning electron microscope performance measurement system;

260 a| Gaithersburg, MD :b| U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,c| [2000-];

300 a| volumes :b| illustrations ;c| 28 cm.;

336 a| text2| rdacontent;

337 a| microform2| rdamedia;

338 a| microfiche2| rdacarrier;

490 1 a| NISTIR;

500 a| "April 2000"--Pt. 1.;

500 a| Shipping list no.: 2000-0860-M (Pt. 1);

504 a| Includes bibliographical references.;

515 a| Issued in parts.;

650 0 a| Scanning electron microscopes.=| ^A343087;

650 0 a| Semiconductor wafersx| Measurement.=| ^A444257;

700 1 a| Ling, Alice V.q| (Alice Valeria)=| ^A574037;

710 2 a| National Institute of Standards and Technology (U.S.)=| ^A259859;

830 0 a| NISTIR.=| ^A682451;

596 a| 1;

998 a| 950194;

999 a| C 13.58w| SUDOCc| 1i| MQ1673490d| 8/7/2007l| JDOMIm| JOYNERr| Ys| Yt| JDOFMIu| 2/24/2004x| MICROFORMz| JFEDDOCSo| .STAFF. 0;

SEM Sentinel : SEM performance measurement system / Alice V. Ling [and others].

Other author	Ling, Alice V. (Alice Valeria)
Other author	National Institute of Standards and Technology (U.S.)
Format	Microform
Publication Info	Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, [2000-]
Description	volumes : illustrations ; 28 cm.
Subjects	Scanning electron microscopes. Semiconductor wafers--Measurement.

Variant title	Scanning electron microscope Sentinel
Portion of title	SEM performance measurement system
Variant title	Scanning electron microscope performance measurement system
Series	NISTIR NISTIR. ^A682451
General note	"April 2000"--Pt. 1.
General note	Shipping list no.: 2000-0860-M (Pt. 1)
Bibliography note	Includes bibliographical references.
Special numbering	Issued in parts.
Reproduction note	Joyner- Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., [2000- microfiches : negative.
GPO item number	0247-D (MF)
Govt. docs number	C 13.58:

Library	Location	Call Number	Status	Item Actions
Joyner	Microforms B300	C 13.58	✔ Available

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