Project portfolio.
| Author/creator | National Semiconductor Metrology Program (U.S.) |
| Other author | National Institute of Standards and Technology (U.S.). Office of Microelectronics Programs. |
| Format | Microform |
| Publication Info | Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, 1996- |
| Description | volumes ; 28 cm. |
| Supplemental Content | https://purl.fdlp.gov/GPO/LPS4434 |
| Subjects |
| Frequency | Annual |
| Series | NISTIR NISTIR. ^A682451 |
| Other forms | Also available via the Internet at the National Semiconductor Metrology Program web site. Address as of: 05/03/00: http://www.eeel.nist.gov/omp/table.htm; current access is available via PURL. |
| Reproduction note | Joyner- Microfiche. 1997- [Washington, D.C.] : Supt. of Docs., U.S. G.P.O. 1998- microfiches : negative. |
| Issuing body | Program administered by the National Institute of Standards and Technology's Office of Microelectronics Programs. |
| LCCN | sn 99034998 |
| GPO item number | 0247-D (MF) |
| GPO item number | 0247-D (online) |
| Govt. docs number | C 13.58: |
| Govt. docs number | C 13.58:5851/ |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | C 13.58:5851/998 | ✔ Available |