Dopant incorporation efficiency in CVD silicon carbide epilayers / D.J. Larkin.
| Author/creator | Larkin, D. J. |
| Other author | United States. National Aeronautics and Space Administration. |
| Format | Book |
| Publication Info | [Washington, DC] : [National Aeronautics and Space Administration] ; [Springfield, Va.] : [National Technical Information Service, distributor], [1996] |
| Description | 1 volume. |
| Series | NASA-TM ; 112756 NASA technical memorandum 112756. ^A467613 |
| General note | Shipping list no.: 98-0613-M. |
| Reproduction note | Joyner- Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1997] 1 microfiche. |
| GPO item number | 0830-D (MF) |
| Govt. docs number | NAS 1.15:112756 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | NAS 1.15:112756 | ✔ Available |