Tools

LEADER 01643cam a2200421 i 4500

001 ocm02796302;

003 OCoLC;

005 20141212142506.0;

008 770202s1977 dcua b f000 0 eng ;

010 a| 77608011;

035 a| (Sirsi) o02796302;

035 a| (OCoLC)2796302;

049 a| ERE#;

050 00 a| QC100b| .U57 no. 400-35a| TK7874;

082 00 a| 602/.1 sa| 621.381/71/028;

086 0 a| C13.10:400-35;

100 1 a| Devaney, John R.=| ^A452773;

245 10 a| Notes on SEM examination of microelectronic devices /c| John R. Devaney, K.O. Leedy, and W.J. Keery.;

260 a| Washington :b| U.S. Dept. of Commerce, National Bureau of Standards :b| For sale by the Supt. of Doc., U.S. Govt. Print. Off,c| 1977.;

300 a| iv, 48 pages :b| illustrations ;c| 26 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 1 a| Semiconductor measurement technology;

490 1 a| NBS special publication ;v| 400-35;

504 a| Includes bibliographical references.;

650 0 a| Miniature electronic equipmentx| Testing.=| ^A332016;

650 0 a| Semiconductorsx| Testing.=| ^A65728;

650 0 a| Scanning electron microscopy.=| ^A300154;

700 1 a| Leedy, Kathryn O.e| author.=| ^A452774;

700 1 a| Keery, W. J.,e| author.=| ^A452775;

830 0 a| Semiconductor measurement technology.=| ^A428054;

830 0 a| NBS special publicationv| 400-35.=| ^A2701;

994 a| C0b| ERE;

596 a| 1;

998 a| 742563;

999 a| C13.10:400-35w| SUDOCc| 1i| 30372013333916d| 6/8/2005l| JDOSm| JOYNERr| Ys| Yt| JDOSBKu| 6/3/2000x| BOOKz| JFEDDOCSo| .STAFF. 0;

Notes on SEM examination of microelectronic devices / John R. Devaney, K.O. Leedy, and W.J. Keery.

Author/creator	Devaney, John R.
Other author	Leedy, Kathryn O. author.
Other author	Keery, W. J., author.
Format	Book
Publication Info	Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Doc., U.S. Govt. Print. Off, 1977.
Description	iv, 48 pages : illustrations ; 26 cm.
Subjects	Miniature electronic equipment--Testing. Semiconductors--Testing. Scanning electron microscopy.

Series	Semiconductor measurement technology NBS special publication ; 400-35 Semiconductor measurement technology. ^A428054 NBS special publication 400-35. ^A2701
Bibliography note	Includes bibliographical references.
LCCN	77608011
Govt. docs number	C13.10:400-35

Library	Location	Call Number	Status	Item Actions
Joyner	Fed Docs Stacks	C13.10:400-35	✔ Available	Place Hold

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