Semiconductor measurement technology : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology".
| Author/creator | Bullis, W. Murray, 1930- |
| Other author | National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division. |
| Format | Microform |
| Publication Info | Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology ; Washington, D.C. : For sale by the Supt. of Docs., U.S. G.P.O., 1993. |
| Description | iv, 27, 201-211 pages : illustrations ; 28 cm. |
| Subjects |
| Series | NIST special publication ; 400-92 NIST special publication 400-92. ^A390056 |
| General note | Distributed to depository libraries in microfiche. |
| General note | Shipping list no.: 94-0057-P. |
| General note | Paper version no longer for sale by the Supt. of Docs. |
| General note | "July 1993." |
| Bibliography note | Includes bibliographical references (p. 23-25). |
| Reproduction note | Joyner- Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative. |
| Other title | Evolution of silicon materials characteristics, lessons learned for improved manufacturing. |
| GPO item number | 0247 (MF) |
| Govt. docs number | C 13.10:400-92 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | C 13.10:400-92 | ✔ Available |