User's manual for the program MONSEL-1 : Monte Carlo simulation of SEM signals for linewidth metrology / Jeremiah R. Lowney and Egon Marx.
| Author/creator | Lowney, J. R., 1946- |
| Other author | Marx, Egon. |
| Other author | National Institute of Standards and Technology (U.S.) |
| Format | Microform |
| Publication Info | Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; Washington, DC : For sale by the Supt. of Docs., U.S. G.P.O., 1994. |
| Description | iv, 39 pages : illustrations ; 28 cm. |
| Subjects |
| Series | NIST special publication ; 400-95 Semiconductor measurement technology Semiconductor measurement technology. ^A428054 NIST special publication 400-95. ^A390056 |
| General note | Distributed to depository libraries in microfiche. |
| General note | Shipping list no.: 94-0956-M. |
| General note | "August 1994." |
| Bibliography note | Includes bibliographical references. |
| Reproduction note | Joyner- Microfiche. [Washington, D.C.?] : Supt. of Docs., U.S. G.P.O., [1994] 1 microfiche : negative. |
| GPO item number | 0247 (MF) |
| Govt. docs number | C 13.10:400-95 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Microforms B300 | C 13.10:400-95 | ✔ Available |