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010 a| 2025043467;

020 a| 9781032747798q| hardback;

020 a| 9781041232087q| paperback;

020 z| 9781003735908q| ebook;

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245 00 a| Micro-fluidic and micro-electromechanical system applicationsh| [electronic resource] :b| subtractive processing of glass substrates /c| edited by Nguyen Van Toan and Tarlochan Singh.;

250 a| First edition.;

260 a| Boca Raton :b| CRC Press,c| 2026.;

263 a| 2603;

300 a| pages cm;

334 a| single unitb| mono0| http://id.loc.gov/vocabulary/issuance/mono;

353 a| bibliographyb| bibliography0| http://id.loc.gov/vocabulary/msupplcont/bibliography;

353 a| indexb| index0| http://id.loc.gov/vocabulary/msupplcont/index;

504 a| Includes bibliographical references and index.;

505 2 a| Micro-grinding process of glass substrates / Ashwani Pratap and Suhas S Joshi -- Ultrasonic machining of glass substrates / Rakesh Kumar, Ravi Pratap Singh, Madhusudan Painuly, Ravinder Kataria, Sandeep Singhal, Ashutosh Kumar Gupta -- Sandblasting of glass substrates / Nguyen Van Toan, Truong Thi Kim Tuoi, Ngoc Dang Khoa Tran, Vien Quoc Nguyen, Duc Nam Nguyen, Nguyen Van Hieu, and Takahito Ono.;

506 a| Available only to authorized users.;

520 a| "The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications. This book: Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications. Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods. Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications. Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass. Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channels. It is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering"-- Provided by publisher.;

538 a| Mode of access: World Wide Web;

650 0 a| Glass manufacture0| http://id.loc.gov/authorities/subjects/sh85055157=| ^A44156;

650 0 a| Micromachining0| http://id.loc.gov/authorities/subjects/sh96011311=| ^A1156423;

650 0 a| Microfabrication0| http://id.loc.gov/authorities/subjects/sh96011316=| ^A868305;

655 0 a| Electronic books.=| ^A491897;

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758 4| http://id.loc.gov/ontologies/bibframe/instanceOf1| http://id.loc.gov/resources/works/in00024485769;

856 40 z| Full text available from eBooks on EBSCOhostu| https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=4346703&scope=site&custid=s5822723&authtype=ip,shib;

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Micro-fluidic and micro-electromechanical system applications subtractive processing of glass substrates / edited by Nguyen Van Toan and Tarlochan Singh.

Other author	Nguyen, Van Toan (Engineer
Other author	Singh, Tarlochan (Engineer
Format	Electronic
Edition	First edition.
Publication Info	Boca Raton : CRC Press, 2026.
Description	pages cm
Supplemental Content	Full text available from eBooks on EBSCOhost
Subjects	Glass manufacture Micromachining Microfabrication

Partial contents	Micro-grinding process of glass substrates / Ashwani Pratap and Suhas S Joshi -- Ultrasonic machining of glass substrates / Rakesh Kumar, Ravi Pratap Singh, Madhusudan Painuly, Ravinder Kataria, Sandeep Singhal, Ashutosh Kumar Gupta -- Sandblasting of glass substrates / Nguyen Van Toan, Truong Thi Kim Tuoi, Ngoc Dang Khoa Tran, Vien Quoc Nguyen, Duc Nam Nguyen, Nguyen Van Hieu, and Takahito Ono.
Abstract	"The reference text focuses on covering advanced manufacturing processes to fabricate microfluidic and micro-electromechanical system devices. It covers the fabrication of multiple hole arrays for interconnects, surface roughening of glass for microsystems packaging applications, and fabrication, and characterization of through-glass via for micro-electromechanical system packaging applications. This book: Presents an overview of subtractive technologies needed to process glass materials for micro-fluidic, and micro-electromechanical system applications. Discusses the latest developments in advanced machining techniques based on mechanical energy, chemical energy, plasma energy, and high-temperature methods. Covers post-processing techniques employed to facilitate the machined glass substrates for the micro-electromechanical system, micro-fluidic, and lab-on-chip applications. Explains advanced techniques such as nonconventional machining processes, hybrid, and sequential machining methods to process glass. Illustrates topics such as photoacoustic biosensing, cantilever beam temperature sensor, and parametric effect on machined micro-channels. It is primarily written for senior undergraduates, graduate students, and academic researchers in the fields of manufacturing engineering, industrial engineering, mechanical engineering, production engineering, materials science, and engineering"-- Provided by publisher.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2025043467
ISBN	9781032747798 hardback
ISBN	9781041232087 paperback
ISBN	ebook

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Micro-fluidic and micro-electromechanical system applications subtractive processing of glass substrates / edited by Nguyen Van Toan and Tarlochan Singh.

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