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010 a| 2025043779;

020 a| 9781041144960q| hardback;

020 a| 9781041145097q| paperback;

020 z| 9781003674795q| ebook;

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100 1 a| Wang, Kaiying0| http://id.loc.gov/authorities/names/n20250380811| http://id.loc.gov/rwo/agents/n2025038081.?| UNAUTHORIZED;

245 10 a| Green etching techniques for MEMS applicationsh| [electronic resource] :b| sustainable, fluorine-free etching methods for micro-electro-mechanical systems /c| Kaiying Wang.;

260 a| Boca Raton :b| CRC Press,c| 2026.;

263 a| 2601;

300 a| pages cm;

334 a| single unitb| mono0| http://id.loc.gov/vocabulary/issuance/mono;

353 a| bibliographyb| bibliography0| http://id.loc.gov/vocabulary/msupplcont/bibliography;

353 a| indexb| index0| http://id.loc.gov/vocabulary/msupplcont/index;

504 a| Includes bibliographical references and index.;

505 0 a| Introduction to green etching in MEMS manufacturing -- Theoretical foundations and mechanisms of etching -- Fluorine-free dry etching for MEMS -- Advanced dry etching technologies for MEMS -- Wet etching alternatives for green MEMS processing -- Electrochemical etching for green MEMS fabrication -- Energy-efficient plasma etching techniques for MEMS -- Industrial adoption and future roadmap for green MEMS etching.;

506 a| Available only to authorized users.;

520 a| "Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems. With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue need by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication"-- Provided by publisher.;

538 a| Mode of access: World Wide Web;

650 0 a| Semiconductorsx| Etching0| http://id.loc.gov/authorities/subjects/sh85119910=| ^A159810;

650 0 a| Microfabricationx| Environmental aspects=| ^A868305;

650 0 a| Electrochemistry, Industrialx| Environmental aspects=| ^A30569;

650 0 a| Green chemistry0| http://id.loc.gov/authorities/subjects/sh99011713=| ^A559340;

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Green etching techniques for MEMS applications sustainable, fluorine-free etching methods for micro-electro-mechanical systems / Kaiying Wang.

Author/creator	Wang, Kaiying
Format	Electronic
Publication Info	Boca Raton : CRC Press, 2026.
Description	pages cm
Supplemental Content	Full text available from eBooks on EBSCOhost
Subjects	Semiconductors--Etching. Microfabrication--Environmental aspects. Electrochemistry, Industrial--Environmental aspects. Green chemistry Microelectromechanical systems

Contents	Introduction to green etching in MEMS manufacturing -- Theoretical foundations and mechanisms of etching -- Fluorine-free dry etching for MEMS -- Advanced dry etching technologies for MEMS -- Wet etching alternatives for green MEMS processing -- Electrochemical etching for green MEMS fabrication -- Energy-efficient plasma etching techniques for MEMS -- Industrial adoption and future roadmap for green MEMS etching.
Abstract	"Green Etching Techniques for MEMS Applications delivers an essential and comprehensive exploration of sustainable, fluorine-free etching methodologies for micro-electro-mechanical systems. With growing environmental concerns around traditional MEMS fabrication, this book addresses a critical issue need by detailing advanced, eco-friendly alternatives that mitigate environmental impacts without compromising technical performance. Covering a spectrum of innovative etching technologies, from dry and wet chemistries to electrochemical and AI-enhanced hybrid methods, the book offers practical guidance, robust theoretical foundations, and insights from real-world industrial case studies. It is a crucial resource for professionals, researchers, and students dedicated to advancing the sustainability of MEMS fabrication"-- Provided by publisher.
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2025043779
ISBN	9781041144960 hardback
ISBN	9781041145097 paperback
ISBN	ebook

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Green etching techniques for MEMS applications sustainable, fluorine-free etching methods for micro-electro-mechanical systems / Kaiying Wang.

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