Tools

LEADER 02387nam a2200481 a 4500

001 ssj0000597111;

003 WaSeSS;

005 20260612090234.0;

006 m d ;

007 cr n ;

008 890828s1989 dcua sb 101 0 eng d;

010 a| 89017931;

020 a| 0841217017 (alk. paper);

035 a| (WaSeSS)ssj0000597111;

040 a| DLCc| DLCd| DLCd| WaSeSS;

049 a| EREEa| NEHH;

050 00 a| TK7871.15.P6b| P635 1989;

082 00 a| 621.381/5312| 20;

245 00 a| Polymers in microlithographyh| [electronic resource] :b| materials and processes /c| Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.;

260 a| Washington, DC :b| American Chemical Society,;

300 a| xii, 449 p. :b| ill. ;c| 24 cm.;

440 0 a| ACS symposium series,x| 0097-6156 ;v| 412;

500 a| "Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989.";

504 a| Includes bibliographical references.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Polymersx| Congresses.=| ^A10854;

650 0 a| Photoresistsx| Congresses.=| ^A242942;

650 0 a| Microlithographyx| Materialsx| Congresses.=| ^A835808;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Reichmanis, Elsa,d| 1953-?| UNAUTHORIZED;

700 1 a| MacDonald, Scott A.?| UNAUTHORIZED;

700 1 a| Iwayanagi, Takao,d| 1949-?| UNAUTHORIZED;

710 2 a| American Chemical Society.b| Division of Polymeric Materials: Science and Engineering.=| ^A638029;

856 40 z| Full text available from ACS eBooks Complete Collectionu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fpubs.acs.org%2Fdoi%2Fbook%2F10.1021%2Fbk-1989-0412;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 6732549;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6732549-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 6/13/2026x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6732549-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 6/13/2026x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6732549-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 6/13/2026x| EBOOKz| JERESOURCE;

Polymers in microlithography materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.

Format	Electronic
Publication Info	Washington, DC : American Chemical Society,
Description	xii, 449 p. : ill. ; 24 cm.
Supplemental Content	Full text available from ACS eBooks Complete Collection
Subjects	Polymers--Congresses. Photoresists--Congresses. Microlithography--Materials. --Congresses.

Other author/creator	Reichmanis, Elsa, 1953-
Other author/creator	MacDonald, Scott A.
Other author/creator	Iwayanagi, Takao, 1949-
Other author/creator	American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Series	ACS symposium series, 0097-6156 ; 412
General note	"Developed from a symposium sponsored by the Division of Polymeric Materials: Science and Engineering at the 197th national meeting of the American Chemical Society, Dallas, Texas, April 9-14, 1989."
Bibliography note	Includes bibliographical references.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	89017931
ISBN	0841217017 (alk. paper)

Availability

Library	Location	Call Number	Status	Item Actions
	Electronic Resources	Access Content Online	✔ Available

Polymers in microlithography materials and processes / Elsa Reichmanis, editor, Scott A. MacDonald, editor, Takao Iwayanagi, editor.

Click here for more information about this title

Availability