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010 a| 93033955;

020 a| 0841227217 (alk. paper);

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040 a| DLCc| DLCd| DLCd| WaSeSS;

049 a| EREEa| NEHH;

050 00 a| TK7871.15.P6b| P628 1994;

082 00 a| 621.3815/312| 20;

245 00 a| Polymers for microelectronicsh| [electronic resource] :b| resists and dielectrics /c| Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.;

260 a| Washington, DC :b| American Chemical Society,;

300 a| xii, 571 p. :b| ill. ;c| 24 cm.;

440 0 a| ACS symposium series,v| 0097-6156 ;x| 537;

500 a| "Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992.";

504 a| Includes bibliographical references and indexes.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microelectronicsx| Materialsx| Congresses.=| ^A35901;

650 0 a| Polymersx| Congresses.=| ^A10854;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Thompson, L. F.,d| 1944-?| UNAUTHORIZED;

700 1 a| Willson, C. G.q| (C. Grant)d| 1939-?| UNAUTHORIZED;

700 1 a| Tagawa, Seiichi.?| UNAUTHORIZED;

710 2 a| American Chemical Society.b| Division of Polymeric Materials: Science and Engineering.=| ^A638029;

710 2 a| American Chemical Society.b| Meetingn| (203rd :d| 1992 :c| San Francisco, Calif.)?| UNAUTHORIZED;

856 40 z| Full text available from ACS eBooks Complete Collectionu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fpubs.acs.org%2Fdoi%2Fbook%2F10.1021%2Fbk-1994-0537;

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596 a| 1 3 4;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6732544-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 6/13/2026x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6732544-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 6/13/2026x| EBOOKz| JERESOURCE;

Polymers for microelectronics resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.

Format	Electronic
Publication Info	Washington, DC : American Chemical Society,
Description	xii, 571 p. : ill. ; 24 cm.
Supplemental Content	Full text available from ACS eBooks Complete Collection
Subjects	Microelectronics--Materials. --Congresses. Polymers--Congresses.

Other author/creator	Thompson, L. F., 1944-
Other author/creator	Willson, C. G. (C. Grant) 1939-
Other author/creator	Tagawa, Seiichi.
Other author/creator	American Chemical Society. Division of Polymeric Materials: Science and Engineering.
Other author/creator	American Chemical Society. Meeting 1992 : San Francisco, Calif.) (203rd :
Series	ACS symposium series, 0097-6156 ; 537
General note	"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Bibliography note	Includes bibliographical references and indexes.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	93033955
ISBN	0841227217 (alk. paper)

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Polymers for microelectronics resists and dielectrics / Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor.

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