Polymeric materials for microelectronic applications science and technology / Hiroshi Ito, editor, Seiichi Tagawa, editor, Kazuyuki Horie, editor.

Format Electronic
Publication InfoWashington, DC : American Chemical Society,
Descriptionix, 468 p. : ill. ; 24 cm.
Supplemental ContentFull text available from ACS eBooks Complete Collection
Subjects
Microelectronics--Materials. --Congresses.
Polymers--Congresses.

Other author/creatorIto, Hiroshi.
Other author/creatorTagawa, Seichi.
Other author/creatorHorie, Kazuyuki, 1941-
Other author/creatorKōbunshi Gakkai (Japan). Polymers for Microelectronics and Photonics Group.
Other author/creatorAmerican Chemical Society. Division of Polymeric Materials: Science and Engineering.
SeriesACS symposium series, 0097-6156 ; 579
General note"Developed from a symposium sponsored by the Polymers for Microelectronics and Photonics Group of the Society of Polymer Science, Japan, and the Division of Polymeric Materials: Science and Engineering, Inc., of the American Chemical Society, at the polymers for microelectronics 1993 meeting, Kawasaki, Japan, November 15-19, 1993."
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 94038922
ISBN0841230552 (acid-free)

Availability

Library Location Call Number Status Item Actions
Electronic Resources Access Content Online ✔ Available