Microelectronics processing inorganic materials characterization / Lawrence A. Casper, editor ; developed from a symposium sponsored by the Division of Industrial and Engineering Chemistry of the American Chemical Society.
| Other author | Casper, L. A. |
| Other author | American Chemical Society. Division of Industrial and Engineering Chemistry. |
| Format | Electronic |
| Publication Info | Washington, DC : American Chemical Society, |
| Description | x, 443 p. : ill. ; 24 cm. |
| Supplemental Content | Full text available from ACS eBooks Complete Collection |
| Subjects |
| Series | ACS symposium series, 0097-6156 ; 295 |
| Bibliography note | Includes bibliographies and indexes. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 85030648 |
| ISBN | 0841209340 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |