Materials for microlithography radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984.
| Format | Electronic |
| Publication Info | Washington, D.C. : The Society, |
| Description | viii, 494 p. : ill. ; 24 cm. |
| Supplemental Content | Full text available from ACS eBooks Complete Collection |
| Subjects |
| Other author/creator | Thompson, L. F., 1944- |
| Other author/creator | Willson, C. G. (C. Grant), 1939- |
| Other author/creator | Fréchet, Jean M. J. |
| Other author/creator | American Chemical Society. Division of Polymeric Materials: Science and Engineering. |
| Other author/creator | American Chemical Society. Division of Polymer Chemistry. |
| Other author/creator | American Chemical Society. Meeting 1984 : St. Louis, Mo.) (187th : |
| Series | ACS symposium series, 0097-6156 ; 266 |
| Bibliography note | Includes bibliographies and indexes. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| Other title | Radiation-sensitive polymers. |
| LCCN | 84021744 |
| ISBN | 0841208719 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |