An Introduction to Microlithography
| Author/creator | Thompson, L. F., 1944- Editor |
| Other author | Wilson, C. G. Editor |
| Other author | Bowden, Murrae J. Editor |
| Format | Electronic |
| Publication Info | Washington : American Chemical Society |
| Description | 384 p. |
| Supplemental Content | Full text available from ACS eBooks Complete Collection |
| Subjects |
| Series | Professional Reference Bks. No. 219 |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 83005968 |
| ISBN | 9780841207752 |
| ISBN | 0841207755 (Library Binding) Out of Print |
| Standard identifier# | 9780841207752 |
| Stock number | 00001081 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |