Kinetic studies in GeO¿́¿/Ge system a retrospective from 2021 / Sheng-Kai Wang.
| Author/creator | Wang, Shengkai, 1984- |
| Format | Electronic |
| Edition | First edition. |
| Publication Info | Boca Raton, FL : CRC Press, 2022. |
| Description | 1 online resource |
| Supplemental Content | Full text available from Taylor & Francis eBooks |
| Subjects |
| Series | Semiconductor technology |
| Abstract | "This title investigates reaction kinetics in GeO2/Ge systems, aiming to demonstrate the fundamentals of the GeO2/Ge interface and to give insight into the distinctive features and performance of Ge (germanium) applied to advanced complementary metal oxide semiconductor (CMOS) devices. The book first reviews the development of MOS technology and discusses the potentials of emerging Ge and the challenges facing it, as a contentious channel material once promising to replace Si (silicon) for advanced nodes. The study systematically analyses the following aspects of GeO2/Ge stacks that will shed light on the characteristics and reaction principles of the system: GeO2/Ge degradation, Ge passivation techniques, desorption kinetics of GeO from GeO2/Ge, the relationship between GeO2 crystallization and GeO2/Ge interface reaction, and the oxidation kinetics of Ge. Based on findings from the intrinsic properties of GeO2/Ge, the author also compares it with prevalent SiO2/Si systems and demonstrates the essential differences between the two, contributing to quality control, process optimization, and technology advancements of GeO2/Ge. The book will be a useful reference for researchers, professionals, and students interested in electronic materials, condenser matter physics, microelectronic engineering, and semiconductors"-- Provided by publisher. |
| General note | Revision of author's thesis (Ph. D.)--University of Tokyo, 2011. |
| Bibliography note | Includes bibliographical references. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Source of description | Description based on print version record and CIP data provided by publisher. |
| Issued in other form | Print version: Wang, Shengkai, 1984- Kinetic studies in GeO¿́¿/Ge system First edition. Boca Raton, FL : CRC Press, 2022 9781032257440 |
| Genre/form | Electronic books. |
| LCCN | 2021055726 |
| ISBN | 9781000581416 (epub) |
| ISBN | 9781003284802 (ebk) |
| ISBN | (hbk) |
| ISBN | (pbk) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |