/LC.GIF&client=easterncarolinaedu)
Capacitive silicon resonators performance enhancement methods / Nguyen Van Toan and Takahito Ono.
| Author/creator | Toan, Nguyen Van |
| Other author | Ono, Takahito. |
| Format | Electronic |
| Publication Info | Boca Raton, FL : CRC Press/Taylor & Francis Group, [2020] |
| Description | pages cm |
| Supplemental Content | Full text available from Taylor & Francis eBooks |
| Supplemental Content | Full text available from eBooks on EBSCOhost |
| Subjects |
| Abstract | "Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology"-- Provided by publisher. |
| Bibliography note | Includes bibliographical references. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2019010375 |
| ISBN | 9780367217761 (hardback : acid-free paper) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |