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245 00 a| Plasma deposition of amorphous silicon-based materialsh| [electronic resource] /c| edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.;

260 a| Boston :b| Academic Press,;

300 a| xi, 324 p. :b| ill. ;c| 24 cm.;

440 0 a| Plasma--materials interactions;

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Amorphous semiconductorsx| Design and construction.=| ^A117903;

650 0 a| Silicon alloys.=| ^A437847;

650 0 a| Plasma-enhanced chemical vapor deposition.=| ^A578663;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Bruno, Giovanni.?| UNAUTHORIZED;

700 1 a| Capezzuto, Pio.?| UNAUTHORIZED;

700 1 a| Madan, A.q| (Arun)?| UNAUTHORIZED;

856 40 z| Full text available from eBook - Materials Science pre-2007u| https://go.openathens.net/redirector/ecu.edu?url=http%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9780121379407;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

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949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6598270-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 7/18/2025x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6598270-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 7/18/2025x| EBOOKz| JERESOURCE;

Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.

Other author	Bruno, Giovanni.
Other author	Capezzuto, Pio.
Other author	Madan, A. (Arun)
Format	Electronic
Publication Info	Boston : Academic Press,
Description	xi, 324 p. : ill. ; 24 cm.
Supplemental Content	Full text available from eBook - Materials Science pre-2007
Subjects	Amorphous semiconductors--Design and construction. Silicon alloys. Plasma-enhanced chemical vapor deposition.

Series	Plasma--materials interactions
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	95012433
ISBN	012137940X (alk. paper)

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Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.

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