Handbook of silicon wafer cleaning technology / edited by Karen A. Reinhardt, Werner Kern.
| Other author | Reinhardt, Karen A. |
| Other author | Kern, Werner, 1925- |
| Format | Electronic |
| Edition | 2nd ed. |
| Publication Info | Norwich, NY : William Andrew, |
| Description | xxvi, 718 p. : ill. ; 24 cm. |
| Supplemental Content | Full text available from eBook - Engineering 2008 |
| Subjects |
| Series | Materials science & process technology series Materials science and process technology series. ^A232492 |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2007037151 |
| ISBN | 9780815515548 |
| ISBN | 0815515545 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |