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003 WaSeSS;

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007 cr n ;

008 120207s2012 maua sb 001 0 eng d;

010 a| 2011276747;

015 a| GBB1996902| bnb;

016 7 a| 0158747762| Uk;

020 a| 9781437778175 (hbk.);

020 a| 1437778178 (hbk.);

035 a| (WaSeSS)ssj0000589238;

042 a| lccopycat;

049 a| EREEa| NEHH;

050 00 a| TK7871.15.F5b| D67 2012;

082 04 a| 621.38152| 23;

100 1 a| Dorey, Robert A.?| UNAUTHORIZED;

245 10 a| Ceramic thick films for MEMS and microdevicesh| [electronic resource] /c| Robert A. Dorey.;

260 a| Waltham, [MA] :b| William Andrew,;

300 a| xviii, 191 p. :b| ill. ;c| 24 cm.;

490 0 a| Micro and nano technologies series;

504 a| Includes bibliographical references (p. 183-185) and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Thick-film circuitsx| Design and construction.?| UNAUTHORIZED;

650 0 a| Microelectromechanical systemsx| Design and construction.=| ^A424252;

650 0 a| Nanoelectronics.=| ^A770469;

655 0 a| Electronic books.=| ^A491897;

830 0 a| Micro & nano technologies.=| ^A1060517;

856 40 z| Full text available from eBook - Materials Science 2011u| https://go.openathens.net/redirector/ecu.edu?url=http%3A%2F%2Fwww.sciencedirect.com%2Fscience%2Fbook%2F9781437778175;

947 a| (OCoLC)ocn751752964;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 6589215;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6589215-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 7/17/2025x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6589215-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 7/17/2025x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 6589215-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 7/17/2025x| EBOOKz| JERESOURCE;

Ceramic thick films for MEMS and microdevices / Robert A. Dorey.

Author/creator	Dorey, Robert A.
Format	Electronic
Publication Info	Waltham, [MA] : William Andrew,
Description	xviii, 191 p. : ill. ; 24 cm.
Supplemental Content	Full text available from eBook - Materials Science 2011
Subjects	Thick-film circuits--Design and construction. Microelectromechanical systems--Design and construction. Nanoelectronics.

Series	Micro and nano technologies series Micro & nano technologies. ^A1060517
Bibliography note	Includes bibliographical references (p. 183-185) and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2011276747
ISBN	9781437778175 (hbk.)
ISBN	1437778178 (hbk.)

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Ceramic thick films for MEMS and microdevices / Robert A. Dorey.

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