2003 International Symposium on Semiconductor Manufacturing
| Author/creator | IEEE, Electron Devices Society Staff |
| Other author | IEEE Components, Packaging and Manufacturing Technology Society Staff. |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway : I E E E Piscataway : IEEE [Distributor] |
| Description | 525 p. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Subjects |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| ISBN | 9780780378940 |
| ISBN | 0780378946 (Trade Paper) Active Record |
| Standard identifier# | 9780780378940 |
| Stock number | CH37462 00066573 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |