MEMS 2005 Miami 18th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Miami Beach, Florida, USA, January 30-February 3, 2005 / sponsored by IEEE and the Robotics and Automation Society.

Portion of title Micro electro mechanical systems
General note"IEEE Catalog Number: 05CH37610"--T.p.
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Other formsAlso issued online with additional title: Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
Other titleMicro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.
LCCN 2005299091
ISBN0780387325
Stock numberIEEE Xplore POP

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