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020 a| 9780470020562;

020 a| 0470020563 (E-Book)c| USD 57.95 Retail Price (NetLibrary, Incorporated)9| Active Record;

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050 0 a| TK7875.F73 2004;

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100 1 a| Franssila, Samie| Author=| ^A872163;

245 10 a| Introduction to Microfabricationh| [electronic resource];

260 a| Chichester : b| John Wiley & Sons, Limiteda| Boulder : b| NetLibrary, Incorporated [Distributor];

300 a| 422 p.c| 24.600 x 018.900 cm.;

506 a| Available only to authorized users.;

520 8 a| Annotationb| Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than device physics * In-depth discussion on process integration showing how processes, materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.;

538 a| Mode of access: World Wide Web;

650 4 a| Electromechanical Devices;

650 4 a| Electronic Apparatus and Appliances;

655 0 a| Electronic books.=| ^A491897;

856 40 z| Full text available from eBooks on EBSCOhostu| https://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&AN=126930&scope=site&custid=s5822723&authtype=ip,shib;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 5693443-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 9/18/2021x| EBOOKz| JERESOURCE;

Introduction to Microfabrication

Author/creator	Franssila, Sami Author
Format	Electronic
Publication Info	Chichester : John Wiley & Sons, Limited Boulder : NetLibrary, Incorporated [Distributor]
Description	422 p. 24.600 x 018.900 cm.
Supplemental Content	Full text available from eBooks on EBSCOhost
Subjects	Electromechanical Devices Electronic Apparatus and Appliances

Summary	Annotation Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.<br /><br />Featuring:<br />* A comprehensive presentation of basic fabrication processes<br />* An emphasis on materials and microstructures, rather than device physics<br />* In-depth discussion on process integration showing how processes, materials and devices interact<br />* A wealth of examples of both conceptual and real devices<br />Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication.<br /><br />This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
ISBN	9780470020562
ISBN	0470020563 (E-Book) Active Record
Stock number	00597025

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