Material Science and MEMS Production

Other author Liu, Changhui Editor
Format Electronic
Publication InfoAedermannsdorf : Trans Tech Publications, Limited
Description128 p.
Supplemental ContentFull text available from Ebook Central - Academic Complete

SeriesAdvanced Materials Research Vol. 901 Ser.
Summary Annotation Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
ISBN9783038350477
ISBN3038350478 (Trade Paper) Active Record
Stock number00128348

Availability

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Electronic Resources Access Content Online ✔ Available