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010 a| 2012405162;

020 a| 9780878492176 (pbk.);

020 a| 0878492178 (pbk.);

035 a| (WaSeSS)ssj0000751455;

042 a| lccopycat;

049 a| EREEa| NEHH;

050 00 a| TK7871.15.S55b| I585 2009;

050 14 a| TA1b| .K5 v.459;

082 00 a| 621.3812| 23;

111 2 a| International Symposium on Silicon Sciencen| (5th :d| 2009 :c| Kiryū-shi, Japan)?| UNAUTHORIZED;

245 10 a| Silicon science and advanced micro-device engineering Ih| [electronic resource] :b| selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /c| edited by Osamu Hanaizumi and Masafumi Unno.;

246 30 a| 5th International Symposium on Silicon Science;

246 3 a| Fifth International Symposium on Silicon Science;

246 30 a| International Symposium on Silicon Science;

246 30 a| 1st International Conference on Advanced Micro-Device Engineering;

246 3 a| First International Conference on Advanced Micro-Device Engineering;

246 30 a| International Conference on Advanced Micro-Device Engineering;

246 30 a| ISSS & AMDE 2009;

246 13 a| ISSS 2009;

246 30 a| AMDE 2009;

260 a| Stafa-Zurich ;a| Enfield, NH :b| Trans Tech Publications,;

300 a| xii, 282 p. :b| ill. ;c| 25 cm.;

490 1 a| Key engineering materials,x| 1013-9826 ;v| v. 459;

504 a| Includes bibliographical references and indexes.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Siliconv| Congresses.=| ^A1156977;

650 0 a| Nanostructuresv| Congresses.=| ^A562884;

650 0 a| Microelectronicsv| Congresses.=| ^A653777;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Hanaizumi, Osamu.?| UNAUTHORIZED;

700 1 a| Unno, Masafumi.?| UNAUTHORIZED;

710 2 a| Gunma Daigaku.b| International Education and Research Center for Silicon Science.?| UNAUTHORIZED;

710 2 a| Gunma Daigaku.b| Advanced Technology Research Center.?| UNAUTHORIZED;

711 2 a| International Conference on Advanced Micro-Device Engineeringn| (1st :d| 2009 :c| Kiryū-shi, Japan)?| UNAUTHORIZED;

830 0 a| Key engineering materials ;v| v. 459.=| ^A516911;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=1872512;

947 a| (OCoLC)ocn701026765;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 4992902;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992902-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 12/10/2018x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992902-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 12/10/2018x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4992902-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 12/10/2018x| EBOOKz| JERESOURCE;

Silicon science and advanced micro-device engineering I selected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan / edited by Osamu Hanaizumi and Masafumi Unno.

Author/creator	International Symposium on Silicon Science
Format	Electronic
Publication Info	Stafa-Zurich ; Enfield, NH : Trans Tech Publications,
Description	xii, 282 p. : ill. ; 25 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Silicon--Congresses. Nanostructures--Congresses. Microelectronics--Congresses.

Other author/creator	Hanaizumi, Osamu.
Other author/creator	Unno, Masafumi.
Other author/creator	Gunma Daigaku. International Education and Research Center for Silicon Science.
Other author/creator	Gunma Daigaku. Advanced Technology Research Center.
Other author/creator	International Conference on Advanced Micro-Device Engineering 2009 : Kiryū-shi, Japan) (1st :
Portion of title	5th International Symposium on Silicon Science
Variant title	Fifth International Symposium on Silicon Science
Portion of title	International Symposium on Silicon Science
Portion of title	1st International Conference on Advanced Micro-Device Engineering
Variant title	First International Conference on Advanced Micro-Device Engineering
Portion of title	International Conference on Advanced Micro-Device Engineering
Portion of title	ISSS & AMDE 2009
Other title	ISSS 2009
Portion of title	AMDE 2009
Series	Key engineering materials, 1013-9826 ; v. 459 Key engineering materials ; v. 459. ^A516911
Bibliography note	Includes bibliographical references and indexes.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2012405162
ISBN	9780878492176 (pbk.)
ISBN	0878492178 (pbk.)

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