Microprocesses and nanotechnology 2003 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].

Author/creator International Microprocesses and Nanotechnology Conference
Format Electronic
Publication InfoTokyo, Japan : Business Center for Academic Societies Japan,
Descriptionxxv, 349 p. : ill. ; 28 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Subjects
Microlithography--Congresses.
Nanotechnology--Congresses.
Microelectronics--Congresses.
Microfabrication--Congresses.

Other author/creatorIEEE Electron Devices Society.
Other author/creatorŌyō Butsuri Gakkai.
Other author/creatorAmerican Vacuum Society.
Other author/creatorIEEE Xplore (Online service)
Portion of title Digest of papers, Microprocesses and nanotechnology 2003
General note"JSAP CAT. No. JSAP031240 ; IEEE Catalog No. 03EX738"--T.p. verso.
Bibliography noteIncludes bibliographical references and author index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2004299804
ISBN4891140402 (pbk.)

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