Microprocesses and nanotechnology 2002 digest of papers : 2002 International Microprocesses and Nanotechnology Conference : November 6-8, 2002, Tokyo, Japan / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].
| Author/creator | International Microprocesses and Nanotechnology Conference |
| Format | Electronic |
| Publication Info | Tokyo, Japan : Business Center for Academic Societies Japan, |
| Description | xxvi, 341, [5] p. : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Subjects |
| Other author/creator | Okazaki, Shinji. |
| Other author/creator | IEEE Electron Devices Society. |
| Other author/creator | Ōyō Butsuri Gakkai. |
| Other author/creator | American Vacuum Society. |
| Other author/creator | IEEE Xplore (Online service) |
| General note | Includes advertising material. |
| General note | Conference number extrapolated. |
| General note | Chair, organizing committee, Dr. Shinji Okazaki. |
| Bibliography note | Includes bibliographic references and author index. |
| Access restriction | Available only to authorized users. |
| Other forms | Also available via the World Wide Web. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2007338293 |
| ISBN | 4891140313 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |