Microprocesses and nanotechnology 2001 2001 International Microprocesses and Nanotechnology Conference, October 31-November 2, 2001, Shimane, Japan : digest of papers / sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].

Other author/creatorŌyō Butsuri Gakkai.
Other author/creatorIEEE Electron Devices Society.
Other author/creatorAmerican Vacuum Society.
Other author/creatorIEEE Xplore (Online service)
General note"JSAP cat. no. AP011235; IEEE catalog no. 01EX468"--T.p. verso.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2002280808
ISBN4891140178

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