IEEE International Conference on Advanced Thermal Processing of Semiconductors : RTP.
| Author/creator | IEEE International Conference on Advanced Thermal Processing of Semiconductors |
| Other author/creator | IEEE Xplore (Online service) |
| Format | Electronic, Book, and Journal |
| Publication Info | Piscataway, N.J. : IEEE, ©2002- |
| Supplemental Content | Click here for full text |
| Subject(s) |
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| Uniform title | IEEE International Conference on Advanced Thermal Processing of Semiconductors (Online) |
| Portion of title | RTP |
| Portion of title | Advanced thermal processing of semiconductors |
| Other title | Rapid Thermal Processing |
| Other title | Proceedings of the IEEE International Conference on Advanced Thermal Processing of Semiconductors |
| Frequency | Annual |
| General note | Title from PDF of title page (viewed August 10, 2004). |
| Access restriction | Available only to authorized users. |
| Other forms | Also available in print. |
| Technical details | Mode of access: World Wide Web. |
| Source of description | 16th (Sept. 30 - Oct. 3, 2008) (IEEE Xplore, viewed Apr 16, 2009). |
| Preceding title | International Conference on Advanced Thermal Processing of Semiconductors. RTP ... (Online) |
| Issued in other form | Print version: IEEE International Conference on Advanced Thermal Processing of Semiconductors 1944-0251 |
| LCCN | 2007242215 |
| ISSN | 1944-026X 1944-026X |
| Stock number | IEEE 445 Hoes Ln., Piscataway, NJ 08854 |
Available Items
| Library | Location | Call Number | Status | Item Actions | |
| Electronic Resources | Access Content Online | ✔ Available |