Gate Dielectric Integrity Material, Process and Tool Qualification
| Author/creator | Gupta, D. C. Author |
| Other author | Brown, George A. 1937- Editor |
| Format | Electronic |
| Publication Info | West Conshohocken : American Society for Testing & Materials |
| Description | 176 p. ill 09.000 x 06.000 in. |
| Supplemental Content | Full text available from ASTM Standards and Engineering Digital Library |
| Subjects |
| Series | STP Ser. Vol. 1382 |
| Summary | Annotation Contains papers from a January 1999 conference held in San Jose, California, describing concepts and metrology of Gate Dielectric Integrity (GDI) and discussing its applications for material and device processes and tool qualification. Topics include methods, protocols, and reliability assessment as related to dielectric integrity. Papers are organized in sections on concepts, thin gate dielectrics, characterization and applications, and standardization. There is also a section summarizing panel discussions. Gupta is affiliated with Mitsubishi Silicon America. Brown is affiliated with Texas Instruments Inc. Annotation copyrighted by Book News, Inc., Portland, OR |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 99086920 |
| ISBN | 9780803126152 |
| ISBN | 0803126158 (Trade Paper) On Demand |
| Standard identifier# | 9780803126152 |
| Stock number | STP 1382 00001664 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |