The Tenth Annual International Workshop on Micro Electro Mechanical Systems an investigation of micro structures, sensors, actuators, machines and robots : proceedings, Nagoya, Japan, January 26-30, 1997 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.

Author/creator IEEE Workshop on Micro Electro Mechanical Systems
Format Electronic
Publication Info[New York] : Institute of Electrical and Electronics Engineers,
Descriptionxxiv, 545 p. : ill. ; 30 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Subjects
Microelectronics--Congresses.
Microelectromechanical systems--Congresses.
Detectors--Congresses.
Actuators--Congresses.

Other author/creatorIEEE Robotics and Automation Society.
Other author/creatorAmerican Society of Mechanical Engineers. Dynamic Systems and Control Division.
Other author/creatorMicromachine Center (Japan)
Other author/creatorIEEE Xplore (Online service)
Variant title Micro electro mechanical systems
Portion of title Investigation of micro structures, sensors, actuators, machines and robots
General note"IEEE catalog number 97CH36021."
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 97145405
ISBN0780337441 (softbound)
ISBN078033745X (casebound)
ISBN0780337468 (microfiche)

Availability

Library Location Call Number Status Item Actions
Electronic Resources ✔ Available