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Micro electro mechanical systems an investigation of micro structures, sensors, actuators, machines, and systems : proceedings / IEEE, Fort Lauderdale, Florida, February 7-10, 1993 ; sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.
| Format | Electronic |
| Publication Info | [New York] : Institute of Electrical and Electronics Engineers ; Piscataway, NJ : IEEE Service Center, |
| Description | xvii, 294 p. : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Conference Proceedings Archive |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Subjects |
| Other author/creator | IEEE Robotics and Automation Society. |
| Other author/creator | American Society of Mechanical Engineers. Dynamic Systems and Control Division. |
| Other author/creator | IEEE Xplore (Online service) |
| Other author/creator | IEEE Workshop on Micro Electro Mechanical Systems (1993 : Fort Lauderdale, Fla.) |
| General note | "1993 IEEE Workshop on Micro Electro Mechanical Systems"--P. iii. |
| General note | "IEEE catalog number 93CH3265-6." |
| General note | Title on spine: IEEE Micro Electro Mechanical Systems Workshop. |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| Other title | IEEE micro electro mechanical systems workshop. |
| Other title | IEEE micro electro mechanical systems. |
| LCCN | 92056273 |
| ISBN | 078030957X (softbound) |
| ISBN | 0780309588 (casebound) |
| ISBN | 0780309596 (microfiche) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |