MEMS 2003 IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003 / sponsored by: IEEE and the Robotics and Automation Society.

Portion of title Micro electro mechanical systems
Portion of title MEMS-03 Kyoto
General note"MEMS-03 Kyoto"--T.p.
General note"IEEE Catalog Number: 03CH37426"--T.p.
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Other formsAlso available via the World Wide Web.
Other formsAlso available via the World Wide Web with additional title: Micro Electro Mechanical Systems, 2003, MEMS-03 Kyoto, IEEE The Sixteenth Annual International Conference on.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
Other titleMicro Electro Mechanical Systems, 2003, MEMS-03 Kyoto, IEEE The Sixteenth Annual International Conference on.
LCCN 2003542936
ISBN0780377443

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