MEMS 2002 the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Las Vegas, Nevada, USA, January 20-24, 2002 / sponsored by IEEE and the Robotics and Automation Society.
| Author/creator | IEEE International Conference on Micro Electro Mechanical Systems |
| Other author | Institute of Electrical and Electronics Engineers. |
| Other author | IEEE Robotics and Automation Society. |
| Other author | IEEE Xplore (Online service) |
| Format | Electronic |
| Publication Info | Piscataway, N.J. : IEEE, |
| Description | xliii, 736 p. : ill. ; 28 cm. |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) Conference Proceedings |
| Supplemental Content | Full text available from IEEE Electronic Library (IEL) |
| Subjects |
| Portion of title | Micro electro mechanical systems |
| Portion of title | MEMS 2002 |
| General note | "IEEE Catalog Number: 02CH37266." |
| Bibliography note | Includes bibliographical references and author index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2003266773 |
| ISBN | 0780371852 |
| ISBN | 0780371860 (microfiche ed.) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | ✔ Available |