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010 a| 96150524;

020 a| 0780325036 (softbound);

020 a| 0780325044 (casebound);

020 a| 0780325052 (microfiche);

035 a| (WaSeSS)ssj0000455360;

040 a| DLCc| DLCd| WaSeSS;

049 a| EREEa| NEHH;

050 00 a| TK153b| .I344 1995;

245 00 a| IEEE micro electro mechanical systemsh| [electronic resource] :b| proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995 /c| sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.;

246 18 a| Micro electro mechanical systems workshop.;

260 a| [New York] :b| Institute of Electrical and Electronics Engineers,;

300 a| 418 p. :b| ill. ;c| 30 cm.;

500 a| "Micro Electro Mechanical Systems Workshop"--Spine.;

500 a| "IEEE catalog number 95CH35754.";

504 a| Includes bibliographical references and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Electromechanical devicesx| Congresses.=| ^A30827;

650 0 a| Microelectronicsx| Congresses.=| ^A35901;

650 0 a| Detectorsx| Congresses.=| ^A141193;

650 0 a| Actuatorsx| Congresses.=| ^A306264;

655 0 a| Electronic books.=| ^A491897;

710 2 a| IEEE Robotics and Automation Society.=| ^A725845;

710 2 a| American Society of Mechanical Engineers.b| Dynamic Systems and Control Division.=| ^A725877;

710 2 a| IEEE Xplore (Online service)=| ^A534875;

711 2 a| IEEE Workshop on Micro Electro Mechanical Systemsd| (1995 :c| Amsterdam, the Netherlands)?| UNAUTHORIZED;

856 40 z| Full text available from IEEE Electronic Library (IEL) Conference Proceedingsu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D3318;

856 40 z| Full text available from IEEE Conference Proceedings Archiveu| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D3318;

856 40 z| Full text available from IEEE Electronic Library (IEL)u| https://go.openathens.net/redirector/ecu.edu?url=https%3A%2F%2Fieeexplore.ieee.org%2Fservlet%2Fopac%3Fpunumber%3D3318;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

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999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4672282-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 3/21/2017x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4672282-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 3/21/2017x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4672282-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 3/21/2017x| EBOOKz| JERESOURCE;

IEEE micro electro mechanical systems proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.

Format	Electronic
Publication Info	[New York] : Institute of Electrical and Electronics Engineers,
Description	418 p. : ill. ; 30 cm.
Supplemental Content	Full text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental Content	Full text available from IEEE Conference Proceedings Archive
Supplemental Content	Full text available from IEEE Electronic Library (IEL)
Subjects	Electromechanical devices--Congresses. Microelectronics--Congresses. Detectors--Congresses. Actuators--Congresses.

Other author/creator	IEEE Robotics and Automation Society.
Other author/creator	American Society of Mechanical Engineers. Dynamic Systems and Control Division.
Other author/creator	IEEE Xplore (Online service)
Other author/creator	IEEE Workshop on Micro Electro Mechanical Systems (1995 : Amsterdam, the Netherlands)
Spine title	Micro electro mechanical systems workshop.
General note	"Micro Electro Mechanical Systems Workshop"--Spine.
General note	"IEEE catalog number 95CH35754."
Bibliography note	Includes bibliographical references and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	96150524
ISBN	0780325036 (softbound)
ISBN	0780325044 (casebound)
ISBN	0780325052 (microfiche)

Availability

Library	Location	Call Number	Status	Item Actions
	Electronic Resources	Online Content Full text available from IEEE Electronic Library (IEL) Conference Proceedings Full text available from IEEE Electronic Library (IEL) Conference Proceedings Full text available from IEEE Electronic Library (IEL) Conference Proceedings	✔ Available

IEEE micro electro mechanical systems proceedings, Amsterdam, the Netherlands, January 29-February 2, 1995 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division.

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