The Eleventh Annual International Workshop on Micro Electro Mechanical Systems an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg.

Author/creator IEEE Workshop on Micro Electro Mechanical Systems
Format Electronic
Publication Info[New York] : Institute of Electrical and Electronics Engineers,
Descriptionxxx, 666 p. : ill. ; 30 cm.
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Subjects
Microelectromechanical systems--Congresses.
Detectors--Congresses.
Microactuators--Congresses.

Other author/creatorIEEE Robotics and Automation Society.
Other author/creatorAmerican Society of Mechanical Engineers. Dynamic Systems and Control Division.
Other author/creatorBaden-Württemberg (Germany). Wirtschaftsministerium.
Other author/creatorIEEE Xplore (Online service)
Variant title Micro electro mechanical systems
Portion of title Investigation of micro structures, sensors, actuators, machines and robots
General note"IEEE catalog number 98CH36176."
Bibliography noteIncludes bibliographical references and indexes.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 98179821
ISBN078034412X (softbound)
ISBN0780344138 (casebound)
ISBN0780344146 (microfiche)

Availability

Library Location Call Number Status Item Actions
Electronic Resources ✔ Available