12th IEEE International Conference on Advanced Thermal Processing of Semiconductors RTP 2004 : September 28-30, 2004, Hilton Portland & Executive Tower, Portland, OR / J. Gelpey ... [et al.], editors ; IEEE, Electron Devices Society.

Portion of title RTP 2004
Portion of title Advanced thermal processing of semiconductors
General note"IEEE Catalog Number: 03EX847"--T.p. verso.
General note"IEEE Catalog Number: 04EX847"--P. 4 of cover.
Bibliography noteIncludes bibliographical references.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2004104134
ISBN0780384776

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