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Chemistry in microelectronics / edited by Yannick Le Tiec.
| Other author | Le Tiec, Yannick. |
| Format | Electronic |
| Publication Info | London : ISTE ; Hoboken, N.J. : Wiley, 2013. |
| Description | xii, 372 pages : illustrations (black and white) ; 24 cm. |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subjects |
| Series | Electronics engineering series Electronics engineering series. UNAUTHORIZED |
| Contents | Chemistry in th "front end of the line" (FEOL) : deposits, gate stacks, epitaxy and contacts / François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec -- Chemistry in interconnects / Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis -- The chemistry of wet surface preparation : cleaning, etching and drying / Yannick Le Tiec and Martin Knotter -- The use and management of chemical fluids in microelectronics / Christiane Gottschalk, Kevin McLaughlin, Julie Cren, Catherine Peyne and Patrick Valenti -- Surface functionalization for micro- and nanosystems : application to biosensors / Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2012955113 |
| ISBN | 9781848214361 (hardback) |
| ISBN | 1848214367 (hardback) |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |