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010 a| 2009049250;

020 a| 9780470596975 (cloth);

020 a| 047059697X (cloth);

035 a| (WaSeSS)ssj0000414604;

049 a| EREEa| NEHH;

050 00 a| TK7872.M3b| M3 2010;

082 00 a| 621.3815/312| 22;

100 1 a| Ma, Xu,d| 1983-?| UNAUTHORIZED;

245 10 a| Computational lithographyh| [electronic resource] /c| Xu Ma and Gonzalo R. Arce.;

260 a| Hoboken, N.J. :b| Wiley,;

300 a| xv, 226 p. :b| ill. ;c| 25 cm.;

490 1 a| Wiley series in pure and applied optics;

504 a| Includes bibliographical references (p. 217-222) and index.;

506 a| Available only to authorized users.;

538 a| Mode of access: World Wide Web;

650 0 a| Microlithographyx| Mathematics.=| ^A835808;

650 0 a| Integrated circuitsx| Design and constructionx| Mathematics.=| ^A164350;

650 0 a| Photolithographyx| Mathematics.=| ^A151248;

650 0 a| Semiconductorsx| Etchingx| Mathematics.=| ^A159810;

650 0 a| Resolution (Optics)=| ^A568011;

655 0 a| Electronic books.=| ^A491897;

700 1 a| Arce, Gonzalo R.=| ^A697472;

830 0 a| Wiley series in pure and applied optics.=| ^A229964;

856 40 z| Full text available from Ebook Central - Academic Completeu| https://ebookcentral.proquest.com/lib/eastcarolina/detail.action?docID=588875;

947 a| (OCoLC)ocn460050552;

949 a| CLICK ON WEB ADDRESSw| ASISh| JOYNER188;

949 a| CLICK ON WEB ADDRESSw| ASISh| HSL77;

949 a| CLICK ON WEB ADDRESSw| ASISh| JMUSIC60;

596 a| 1 3 4;

998 a| 4439264;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4439264-1001l| JNETm| JOYNERr| Ys| Yt| JNESSBKu| 6/28/2016x| EBOOKz| JERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4439264-2001l| HSLELECm| HSLr| Ys| Yt| HEBKu| 6/28/2016x| EBOOKz| HERESOURCE;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 4439264-3001l| MNETm| JMUSICr| Ys| Yt| MNESSBKu| 6/28/2016x| EBOOKz| JERESOURCE;

Computational lithography / Xu Ma and Gonzalo R. Arce.

Author/creator	Ma, Xu, 1983-
Other author	Arce, Gonzalo R.
Format	Electronic
Publication Info	Hoboken, N.J. : Wiley,
Description	xv, 226 p. : ill. ; 25 cm.
Supplemental Content	Full text available from Ebook Central - Academic Complete
Subjects	Microlithography--Mathematics. Integrated circuits--Design and construction. --Mathematics. Photolithography--Mathematics. Semiconductors--Etching. --Mathematics. Resolution (Optics)

Series	Wiley series in pure and applied optics Wiley series in pure and applied optics. ^A229964
Bibliography note	Includes bibliographical references (p. 217-222) and index.
Access restriction	Available only to authorized users.
Technical details	Mode of access: World Wide Web
Genre/form	Electronic books.
LCCN	2009049250
ISBN	9780470596975 (cloth)
ISBN	047059697X (cloth)

Library	Location	Call Number	Status	Item Actions
	Electronic Resources	Access Content Online	✔ Available

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