Radio frequency power in plasmas 14th topical conference : Oxnard, California, 7-9 May 2001 / editors, Tak Kuen Mau, John deGrassie.

Author/creator Topical Conference on Radio Frequency Power in Plasmas
Other author Mau, T. K. (Tak Kuen), 1950-
Other author DeGrassie, John.
Format Electronic
Publication InfoMelville, N.Y. : American Institute of Physics,
Descriptionxvi, 544 p. : ill. ; 24 cm.
Supplemental ContentFull text available from AIP Conference Proceedings
Subjects

SeriesAIP conference proceedings, 0094-243X ; 595
AIP conference proceedings ; no. 595. ^A24766
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2001096021
ISBN0735400385

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