IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996 / sponsored by the IEEE Robotics and Automation Society.

Author/creator IEEE Workshop on Micro Electro Mechanical Systems
Other author IEEE Robotics and Automation Society.
Other author IEEE Xplore (Online service)
Format Electronic
Publication Info[New York] : Institute of Electrical and Electronics Engineers,
Descriptionxxiv, 530 p. : ill. ; 30 cm.
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Subjects
Electromechanical devices--Congresses.
Microelectronics--Congresses.
Detectors--Congresses.
Actuators--Congresses.

Variant title Micro electro mechanical systems workshop.
General note"IEEE catalog number 96CH35856."
Bibliography noteIncludes bibliographical references.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 97131850
ISBN0780329856 (softbound)
ISBN0780329864 (casebound)
ISBN0780329872 (microfiche)

Availability

Library Location Call Number Status Item Actions
Electronic Resources ✔ Available